发明名称 DRIVE METHOD FOR DRIVE UNIT
摘要 PURPOSE: To make a drive circuit simple, by controlling a drive voltage in a way that an absolute value of a secondary differential term applied for an expansion and contraction time is larger than an absolute value of a critical secondary differential term that gives a boundary of dynamic and stationary frictional state between a drive plate and a moving body. CONSTITUTION: A drive voltage is controlled in away that an absolute value of a secondary differential term applied for an expansion time (t1 to t0 ) and a contraction time (t2 to t1 ) is made larger than an absolute value of a critical secondary differential term that gives a boundary of dynamic and stationary frictional state between a driving plate 12 and a moving body 15. When the piezoelectric elements 14a and 14b are shifted to the right during the expansion time, the drive plate 12 and the moving body 15 come in a dynamic frictional state, and the drive plate 12 is shifted just a distance of L5 relatively from the moving body 15, while the moving body 15 is not changed in position. When the piezoelectric elements 14a and 14b are shifted to the left, the drive plate 12 is shifted just a distance of L6 relatively from the moving body 15.
申请公布号 JPH08340681(A) 申请公布日期 1996.12.24
申请号 JP19950143468 申请日期 1995.06.09
申请人 NIKON CORP 发明人 FUKUDA TAIICHIRO
分类号 H02N2/00 主分类号 H02N2/00
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