| 摘要 |
<p>A vapor pressure sensor (11) comprising a substrate having a body (31) with first (33) and second (32) planar parallel surfaces. A hole (46) is formed in the body (31) and extends through the first surface (33) and between the first (33) and second (32) surfaces. A beam (51) is disposed in the hole (46) in the body (31) and is formed integral with the body (31) and forms a junction with the body (31) and is formed as a cantilever in the hole (46) in the body (31). The beam (51) has a surface. A vapor adsorbing coating (48) is carried by the surface of the beam and the coating (48) is substantially uniform in thickness. It is adhered to the surface of the beam and is fully shear restrained by the beam. A strain measuring device (36) is carried by the substrate and disposed at the junction between the body (31) and the beam (51) to measure shear forces placed in the beam by the vapor adsorbing coating. The vapor adsorbing coating expands and contracts in directions parallel to the surface of the beam (51) as the vapor adsorbing coating (48) adsorbs and desorbs vapor.</p> |
