| 摘要 |
Target surface (112) image, represented by several points on surface (112), each represented by X, Y, Z cartesian coordinates, is obtained with confocal microscope (100). Microscope (100) selects a starting position for objective lens (110) of microscope (100) along a Z vector normal to surface (112). A preselected range of travel of the objective lens (110) is divided into several Z positions. Objective lens (110) is then positioned and surface (112) scanned at each Z position. Each scanned Z position provides signals representing the reflected intensity of laser light. For each point on surface (112), microscope (100) finds the Z coordinate of the point by determining the greatest return intensity of reflected laser light. From this, any particular Z coordinate is obtainable because maximum reflected intensity for a given point gives the Z location of that point on surface (112). From this, Z locations are compared to determine low/high points on surface (112). A second scan is set up using low/high points on surface (112) to determine the optical scan parameters.
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