| 摘要 |
A method of manufacturing a programmable semiconductor element in the form of an anti-fuse, comprising a thin layer of silicon oxide between two electrode regions, such that a connection can be formed between these electrode regions through electric breakdown in the oxide. In the method, a nitrogen implantation is first carried out at the area of the oxide to be formed, so that a thin layer comprising nitrogen is formed at the surface, which has an oxidation-decelerating effect. Then the oxide is provided through thermal oxidation. Owing to the oxidation-decelerating effect of the layer with nitrogen, an extremely thin oxide layer, for example 5 nm thick, may be obtained in a reproducible manner in a sufficiently long oxidation time. |
