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发明名称
Vorrichtung zum Beschichten eines Substrats
摘要
申请公布号
DE3929695(C2)
申请公布日期
1996.12.19
申请号
DE19893929695
申请日期
1989.09.07
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450 HANAU, DE
发明人
LATZ, RUDOLF, DR., 63110 RODGAU, DE;SCHERER, MICHAEL, DR., 63517 RODENBACH, DE
分类号
C23C14/06;C23C14/35;H01J37/34;(IPC1-7):C23C14/35;C23C14/08
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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