Bolometric detecting device for millimeter and submillimeter waves and method of manufacturing this device

摘要

The device (1) includes an array of bolometers (4) which are obtained on a transparent silicon substrate (6). each bolometer (8) includes a resonant cavity 910) covered by a grating (12) thermally insulated from the substrate. A periodic pattern (14) with conducting properties is formed on the grating while a thermometer (16) is attached to it. The grating is supported by two arms (18,20). Two electrical conductors (22,24) are provided for the thermometer power supply and reading its indications, respectively.