发明名称 |
Tunnel unit and scanning head for scanning tunneling microscope. |
摘要 |
A scanning head for a scanning tunneling microscope comprising: a scanning head main body having an opening formed therein for observation; a piezoelectric element fixed to said scanning head main body and disposed inside said scanning head main body; a probe mounted on said piezoelectric element and disposed in the vicinity of said opening of said scanning head main body; and an observation window body provided in said opening of said scanning head main body in such a manner as to close said opening, said observation window body being optically transparent and capable of preventing the inside of said scanning main body from being subjected to external disturbance. <IMAGE> |
申请公布号 |
EP0664448(A3) |
申请公布日期 |
1996.12.18 |
申请号 |
EP19950103363 |
申请日期 |
1989.06.20 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
NISHIOKA, TADASHI;YASUE, TAKAO;KOYAMA, HIROSHI |
分类号 |
H01J37/20;G01B7/34;G01N27/00;G01N37/00;G01Q10/02;G01Q60/10;G12B5/00;H01J37/28;H01J37/285;(IPC1-7):G01N27/00 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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