| 摘要 |
In order to provide a low cost solar cell which has a high quality, little stressed polycrystalline silicon semiconductor layer of large crystal sizes on a low cost metal substrate and to provide a production process therefor, the solar cell has a metal layer, a metal oxide layer, and a polycrystalline silicon semiconductor layer formed in this order on the substrate, and the production process therefor comprises a step of depositing the metal layer on the substrate, a step of depositing the metal oxide layer on the metal layer, a step of depositing the semiconductor layer on the metal oxide layer, a step of depositing a cap layer on the surface of the semiconductor layer and fusing and solidifying the semiconductor layer by radiant heating from above the cap layer to form the polycrystalline semiconductor layer, and a step of removing the cap layer.
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