APPARATUS FOR MEASURING POSITION OF PATTERN,申请号JP19950161491-传众专利搜索

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发明名称	APPARATUS FOR MEASURING POSITION OF PATTERN
摘要
申请公布号	JPH08334311(A)	申请公布日期	1996.12.17
申请号	JP19950161491	申请日期	1995.06.05
申请人	NIKON CORP	发明人	SUEYOSHI MASASHI;KATO KINYA
分类号	G01B11/00;G01B21/00;(IPC1-7):G01B11/00	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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