APPARATUS FOR DETECTING DEFECT OF BARE CHIP OF MULTICHIP MODULE,申请号JP19950143234-传众专利搜索

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发明名称	APPARATUS FOR DETECTING DEFECT OF BARE CHIP OF MULTICHIP MODULE
摘要
申请公布号	JPH08334544(A)	申请公布日期	1996.12.17
申请号	JP19950143234	申请日期	1995.06.09
申请人	FUJITSU LTD	发明人	KAWASHIMA SHINICHI
分类号	G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/26	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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