| 摘要 |
PURPOSE: To form smooth and flat orientation surfaces and to stabilize orientation by specifying the crystal grain sizes of transparent electrodes to specific values or below and forming inorg. films having crystal grain sizes of specific values or below between the transparent electrodes and oriented films. CONSTITUTION: The crystal grain size of the transparent electrodes 2 formed on a pair of substrates 1 facing each other are <=0.1μm and further, the inorg. films having the crystal grain sizes of <=0.1μm are formed between the transparent electrodes 2 and the oriented films 3. The crystal grain sizes of the transparent electrodes 2 and the inorg. films are required to be <=0.1μm. The ruggedness of the surfaces increases and is liable to affect the tilt angles of liquid crystal molecules if the crystal grain sizes exceed 0.1μm. The oriented films 3 are formed of a film thickness of 300 to 1000 angstrom. The oriented films are liable to be affected by the surface condition of the transparent electrodes 2 of the lower layers and the nonuniformity of the tilt angels of the liquid crystal molecules is resulted if the film thickness is below 300 angstrom. The problem of the resistance between the upper and lower transparent electrodes 2 and orientation characteristics arises if the film thickness exceeds 1000 angstrom.
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