INTERLAYER INSULATION FILM FORMING METHOD,申请号JP19950140447-传众专利搜索

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发明名称	INTERLAYER INSULATION FILM FORMING METHOD
摘要
申请公布号	JPH08335629(A)	申请公布日期	1996.12.17
申请号	JP19950140447	申请日期	1995.06.07
申请人	SONY CORP	发明人	MORIYAMA ICHIRO
分类号	H01L21/768;(IPC1-7):H01L21/768	主分类号	H01L21/768
代理机构		代理人
主权项
地址

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