| 摘要 |
PURPOSE: To provide a highly sensitive vibration gyro with a simple constitution. CONSTITUTION: The vibration gyro is formed of a quartz plate by etching. Four vibrating elements 14-20 are projected in the shape of H from a supporting body 22 in the interior of an opening of a frame body 12. The supporting body 22 is fixed and supported to the frame body 12 by left and right coupling elements 24, 26. The vibrating elements 14, 16 are provided with excitation electrodes 28, 30 for vibrating the elements 14, 16 in a direction of an X axis. Moreover, the vibrating elements 18, 20 are provided with vibration detection electrodes 32, 34 for detecting a vibrating state when the vibrating elements 18, 20 vibrate in a direction of a Y axis. The supporting body 22 has distortion detection electrodes 36, 38 for detecting a distortion degree if the supporting element is distorted. The vibrating elements 14, 16 are vibrated by the excitation electrodes 28, 30 in accordance with the distortion degree of the supporting body 22 detected by the distortion detection electrodes 36, 38. |
