| 摘要 |
PURPOSE: To manufacture a vibration gyroscope in a second dimensional arrangement of electrodes, improve accuracy, and make elements minute and durable, by providing reflectors respectively in the back of driving electrodes and detecting electrodes arranged right and left, and up and down via perturbation electrodes. CONSTITUTION: Driving electrodes 1, 2 are arranged at both sides in an x-axis direction of a perturbation part 10 where perturbation electrodes 9 are set. A reflector 3 and a reflector 4 are disposed in the back of the electrode 1 and the electrode 2, respectively. Detecting electrodes 5, 6 are set at both sides in a y-axis direction of the perturbation part 10. A reflector 7 and a reflector 8 are arranged in the back of the electrode 5 and the electrode 6 respectively. Since the electrodes 9 are arranged so that the elastic waves driven by the electrodes 9 are agreed in phase, an elastic wave is excited in a space between the electrodes 5 and 6. Owing to the presence of the reflectors 7, 8, the wave excited by the Corioli's force excites standing waves. Since an intensity of the standing waves is proportional to the Corioli's force, a rotational angular velocity is measured by measuring a voltage of the electrodes 5, 6. |
