| 摘要 |
PURPOSE: To provide the manufacturing process of a ceramic heater with high durability. CONSTITUTION: A pair of current carrying parts 4, 5 are formed on the surface of a first green sheet 2a which becomes a first substrate 2 by screen printing of Pt (platinum) paste. SiO2 powder 7 is attached on the whole surface of the first green sheet 2a. A metal foil prepared by dispersing Al2 O3 particles in Pt is cut in the specified shape and arranged on the surface of the first green sheet 2a to form a heat generating part 6. Both ends 6a, 6b of the heat generating part 6 are brought into contact with the Pt paste at the other ends of each current carrying parts 4, 5, then piled up to connect the heat generating part 6 to the current carrying parts 4, 5. SiO2 powder 8 is attached, on the surface of a second green sheet 3a which becomes a second substrate 3, and the surface is tightly contacted by applying pressure on the surface of the first green sheet 2a on which the current carrying parts 4, 5 and the heat generating part 6 are arranged. Both green sheets 2a, 3a are baked in the specified baking temperature pattern. |
