ACTIVE MATRIX LIQUID CRYSTAL DISPLAY AND ITS MAKING METHOD

摘要

forming the first gate wiring and storage capacitance electrode(1) by stacking a transparent first metal not anodized on a transparent insulating substrate(S); depositing the second metal(2) and the third metal(3) on the pattern(1) to pattern the third metal(3) into a gate-wiring; forming the second gate-wiring with the second metal(2) which is not anodized, the third gate-wiring with the third metal(3), the first gate insulator(3') with an anodized oxide film of the third metal and a storage capacitance dielectric film with an anodized oxide film of the second metal; forming the second gate insulator(4), a semiconductor layer(5) and an etching-stopper layer(6); forming an active layer with an n+ a-Si(7); forming a transparent pixel electrode(8); and forming a source/drain(9) to etch the active layer to deposit an over coat layer(10).