| 摘要 |
PURPOSE: To achieve ferrite lamination thin film for indicating improved soft magnetic characteristics at a specific high-frequency region. CONSTITUTION: A feed gas is introduced into a reaction chamber 1 with an exhaust means, power is supplied between a substrate holder 3 and an electrode 4 being provided in the reaction chamber 1 for turning the feed gas into plasma, and ferrite lamination thin film is formed on a ground substrate 4 at 300 deg.C being retained at the substrate holder 3. First, a feed gas consisting ofβ- diketone complex gas of iron (Fe),β-diketone complex gas of cobalt (Co), carrier gas, and oxygen gas is introduce into a reaction chamber 1 to form Co ferrite layer. Then, a feed gas consisting ofβ-diketone complex gas of iron (Fe),β- diketone complex gas of nickel (Ni),β-diketone complex gas of zinc (Zn), carrier gas, and oxygen gas is introduced into the reaction chamber 1 to form Ni-Zn ferrite layer. The above two processes are performed alter nately.
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