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发明名称
摘要
申请公布号
JP2563315(B2)
申请公布日期
1996.12.11
申请号
JP19870074718
申请日期
1987.03.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
WASA KYOTAKA;SETSUNE KENTARO;ADACHI HIDEAKI;MITSUYU TSUNEO;HATSUTA SHINICHIRO
分类号
H01L39/12;C01G1/00;C01G3/00;C04B35/00;C04B35/45;C23C14/08;C23C14/34;C30B29/22;H01B12/06;H01B13/00
主分类号
H01L39/12
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代理人
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地址
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