发明名称 |
Method and apparatus for characterising multilayer thin film systems and for measuring the distance between two surfaces in the presence of thin films |
摘要 |
<p>A method and apparatus are disclosed for characterising a one or more layer thin film system on a substrate, in particular in respect of layer thickness and refractive index, and for measuring the distance between two surfaces, wherein at least one of the surfaces comprises a one- or multi-layer system, taking into account, and allowing rectification of, the phase contribution from the thin film stack, by interferometry, in particular by white-light channelled spectrum interferometry or multi-wavelength interferometry. <IMAGE></p> |
申请公布号 |
EP0747666(A2) |
申请公布日期 |
1996.12.11 |
申请号 |
EP19960108686 |
申请日期 |
1996.05.30 |
申请人 |
HOLTRONIC TECHNOLOGIES LIMITED |
发明人 |
GRAY, SIMON;DANDLIKER, RENE, PROF.;SCHNELL, URBAN |
分类号 |
G01B11/06;G01B11/14;H01L21/66;(IPC1-7):G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|