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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH08325092(A)
申请公布日期
1996.12.10
申请号
JP19950131592
申请日期
1995.05.30
申请人
MITSUBISHI HEAVY IND LTD
发明人
TAKEUCHI YOSHIAKI;MURATA MASAYOSHI;KOJO DAIICHI
分类号
C30B25/00;C23C16/455;C30B25/14;(IPC1-7):C30B25/00
主分类号
C30B25/00
代理机构
代理人
主权项
地址
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