OPTICAL DEVICE, LASER BEAM SOURCE, LASER APPARATUS AND METHOD OF PRODUCING OPTICAL DEVICE

摘要

After a polarization inversion layer (3) is formed on a LiTaO3 substrate (1), an optical waveguide is formed. This structure is annealed at low temperature so that the refractive index increased due to a high-temperature heat treatment is decreased to obtain a stable proton exchange layer (8a), which forms a stable optical wavelength conversion device. In consequence, a phase matching wavelength becomes constant and the fluctuation of harmonic output can be eliminated. Therefore, a high-reliability optical wavelength conversion device is provided using a nonlinear optical effect.