发明名称 |
PROCESS FOR FABRICATING LAYERED SUPERLATTICE MATERIALS AND MAKING ELECTRONIC DEVICES INCLUDING SAME |
摘要 |
A liquid precursor containing a metal is applied to a substrate, RTP baked, and annealed to form a layered superlattice material. Special polyoxyalkylated precursor solutions are designed to optimize polarizability of the corresponding metal oxide materials by adding dopants including stoichiometric excess amounts of bismuth and tantalum. The RTP baking process is especially beneficial in optimizing the polarizability of the resultant metal oxide. |
申请公布号 |
WO9630938(A3) |
申请公布日期 |
1996.12.05 |
申请号 |
WO1996US03367 |
申请日期 |
1996.03.12 |
申请人 |
SYMETRIX CORPORATION;OLYMPUS OPTICAL CO., LTD. |
发明人 |
YOSHIMORI, HIROYUKI;PAZ DE ARAUJO, CARLOS, A.;ITO, TAKESHI;SCOTT, MICHAEL, C.;MCMILLAN, LARRY, D. |
分类号 |
H01L21/8247;B05D1/00;B05D3/04;B05D7/24;C23C16/44;C23C16/448;C23C16/455;C23C16/46;C23C16/48;C23C16/52;C23C18/12;C23C26/02;C30B7/00;H01C7/10;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;H01L27/108;H01L27/115;H01L29/788;H01L29/792;H01L41/24;H05K3/10 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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