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经营范围
发明名称
RESIST PROCESSING APPARATUS
摘要
申请公布号
JPH08316138(A)
申请公布日期
1996.11.29
申请号
JP19960097969
申请日期
1996.04.19
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
USHIJIMA MITSURU;HIRAKAWA OSAMU
分类号
G03F7/38;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/38
代理机构
代理人
主权项
地址
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