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发明名称
ION SOURCE
摘要
申请公布号
JPH08315743(A)
申请公布日期
1996.11.29
申请号
JP19950138367
申请日期
1995.05.12
申请人
NISSIN ELECTRIC CO LTD
发明人
MAENO SHUICHI;ANDO YASUNORI;INAMI HIROSHI
分类号
H05H1/11;H01J27/02;H01J37/08;(IPC1-7):H01J27/02
主分类号
H05H1/11
代理机构
代理人
主权项
地址
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