APPARATUS AND METHOD FOR TRANSFERRING SUBSTRATE

摘要

PURPOSE: To effectively transfer a plurality of substrates to a carrier case in a predetermined orientation. CONSTITUTION: This apparatus comprises an apparatus for transferring substrates wherein a plurality of substrates 5 accomodated in an original carrier case 4 such that the fronts and back surface of the substrates face to each other are transferred to a carrier case to be transferred such that the surfaces face to each other and the back surfaces face to each other. The apparatus includes a transfer chuck 1 having a substrate holder 2 capable of holding the plurality of the substrates 5 accomodated in the carrier case 4 for each substrate 5 additionally to a reverse mechanism for relatively reversing the orientations of the transfer chuck 1 and the carrier case to be transferred.