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发明名称
DEVICE AND METHOD FOR PROCESSING TEST DATA OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08313594(A)
申请公布日期
1996.11.29
申请号
JP19950120102
申请日期
1995.05.18
申请人
MITSUBISHI ELECTRIC CORP;RYODEN SEMICONDUCTOR SYST ENG KK
发明人
MUKOGAWA YASUKAZU;KOYAMA TORU;OTA FUMITO;TSUTSUI TOSHIKAZU;MASUKO YOJI;FURUTA MASAAKI
分类号
G01R31/28;G11C29/00;G11C29/10;G11C29/44;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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