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发明名称
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE AND MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08316129(A)
申请公布日期
1996.11.29
申请号
JP19950122174
申请日期
1995.05.22
申请人
NEC CORP
发明人
MAEDA AKIHIRO
分类号
H01L21/306;H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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