SOI SUBSTRATE AND ITS MANUFACTURE,申请号JP19950124853-传众专利搜索

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发明名称	SOI SUBSTRATE AND ITS MANUFACTURE
摘要
申请公布号	JPH08316442(A)	申请公布日期	1996.11.29
申请号	JP19950124853	申请日期	1995.05.24
申请人	MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SHILICON CORP	发明人	ISHIGAMI SHUNICHIRO;MORITA ETSURO;FURUYA HISASHI
分类号	H01L21/316;H01L21/02;H01L21/318;H01L21/322;H01L27/12;(IPC1-7):H01L27/12	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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