ELECTROSTATIC SCAN TYPE ION IMPLANTATION METHOD,申请号JP19950145679-传众专利搜索

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发明名称	ELECTROSTATIC SCAN TYPE ION IMPLANTATION METHOD
摘要
申请公布号	JPH08315765(A)	申请公布日期	1996.11.29
申请号	JP19950145679	申请日期	1995.05.19
申请人	SONY CORP	发明人	NOBE TAKESHI
分类号	H01J37/317;H01L21/265;(IPC1-7):H01J37/317	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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