| 摘要 |
PURPOSE: To provide a microactuator by which an extremely-high-accuracy microdisplacement on the order of an angstrom unit can be realized, whose driving voltage is low, whose driving force is high and which can be displaced digitally. CONSTITUTION: In a microactuator, its manufacturing method and a vibrating gyro using it, unit actuators 6, 7 composed of one pair of substrates 1, 2 laminated so as to form respective hollow parts 5 via LB films 3, 4 as spacers are provided, power supplies 20, 21 which apply respective voltages across the substrates are provided, and, when the voltages are applied to the substrates 1, 2, the substrates are displaced in the inside direction by an electrostatic attractive force. |
