| 摘要 |
PURPOSE: To improve the corrosion resistance and the magnetic anisotropy while maintaining excellent soft magnetic properties in a soft magnetic thin film containing Fe or Co as a main body. CONSTITUTION: A soft magnetic thin film comprises at least one type of magnetic element selected from Fe and Co, a first element solid solution or diffused in anα-Fe phase orα-Co phase, and at least one type of second element selected from a group consisting of C, B and N, wherein at least one crystal surface of the crystalline phase of the magnetic element is preferentially oriented. The crystal surface preferentially oriented is at least one of theα-Fe phase (110) and (200) plane or theα-Co phase (110) plane.
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