| 摘要 |
PURPOSE: To secure the output linearity of a capacitance type acceleration sensor by detecting the X-, Y-, and Z-axis components of the electric signal of each capacitance element by calculating the differences between the electric signals from axially paired elements after correcting the electric signals to values proportional to acceleration. CONSTITUTION: A capacitance type acceleration sensor is constituted by providing a fixed substrate 11 and mobile substrate 12 in parallel with each other and constituting capacitance elements C1 -C5 by arranging electrodes 1-4 around an electrode 5 on the facing face of each substrate 11 and 12. The linearity of the output of the sensor is secured and the X-, Y-, and Z-axis outputs of the sensor are completely separated from each other, by calculating the difference between the electric signals from elements C1 and C3 and C2 and C4 which are respectively paired in the axial direction after the electric signals are corrected to values proportional to acceleration. |
