| 摘要 |
<p>PURPOSE: To provide a resist processing device which is prolonged in the effective life of filter sections by suppressing the variation in the consumption of the acid components attached to filter media. CONSTITUTION: The first filter section 61 is constituted by arranging a first filter media 70 and second filter media 71 formed by bending sheet bodies attached with, for example, phosphoric acid to a pleat form by superposing the peak side parts A of the one filter medium and the valley side parts B of the other filter medium in such a manner that the bent surfaces are vented. The outdoor air is taken into the device through the filter section 61. The peak side parts A of the filter media consume acid components more than the valley side parts B but the device is provided with the first filter media 70 and the second filter media 71 in such a manner that the parts consuming the acid components at a higher ratio and the parts consuming the acid components at a lower ratio overlap on each other, by which the variations in the consumption are decreased and the effective use of the filter media is made possible.</p> |
