| 摘要 |
<p>PURPOSE: To provide paste with less dispersion of resistance values in a very high resistance region even after a change with the lapse of time by mixing conductive glass powder containing a pyrochlore type conductive material and TiO2 powder, heattreating in a specified temperature region, then forming the paste. CONSTITUTION: Conductive glass powder containing pyrochlore type conductive material obtained by melting a mixture of RuO2 , PbO, SiO2 , and Al2 O3 , for example, cooling, then crushing, and TiO2 powder having a particle size of 0.1-1μm are accurately weighed with a digital balance so that the content of the TiO2 powder becomes 5-20wt.% and mixed. When they are mixed, an organic solvent such as ethyl alcohol is added, then they are mixed at 50-1000rpm for 48 hours or more in a wet process. The mixture obtained is dried in a drying furnace kept at 60-120 deg.C, put into an alumina crucible, heat treated in a vertical furnace or the like in an oxidizing atmosphere at 60 deg.C for one hour or more. A substance obtained is crushed in particles having a mean particle size of about 2μm to form conductive glass powder for forming a resistance film.</p> |
