| 摘要 |
<p>PURPOSE: To resolve problems of a heat transmission check and turn-around of plasma discharge by a method wherein a metal material excellent in heat conductive characteristics is used as a pedestal material and an electrostatic attraction ceramic plate is directly or indirectly connected to this pedestal. CONSTITUTION: Pure aluminum is used in a pedestal 1 and a junction face is performed Ni plating. Alumina ceramic of 93wt.% Al2 O3 is employed in a ceramic cover 2 and an electrostatic attracting ceramic 3, and a portion of the electrostatic ceramic 3 is processed in a diameter 150 and a thickness 0.3mm. A thickness of cover ceramic is unequal and 0.2 to 7mm. 42Ni alloy intermediate layer 4 of a thickness 0.5mm for stress buffering is employed between the electrostatic attracting ceramic 3 and the pedestal metal 1. On a reverse face of the electrostatic attracting ceramic 3, copper-5%Ti is heated at 1200 deg. for 5 minutes and metallized and performed Ni plating. In solder is used for junction. Thus, problems of a heat transmission check and turn-around of plasma discharge can be resolved.</p> |
