| 摘要 |
PURPOSE: To provide a shape measuring apparatus by which deflection scanning operation can be performed by using a stable high-speed rotation and whose resolution is high. CONSTITUTION: A shape measuring apparatus is provided with a blinking laser light source 1, with a pattern memory 17 which has stored its blinking pattern, with a polygon mirror 3 and with a CCD camera 6, and it computes the shape of an object Q, to be measured, on the basis of imaged data by the CCD camera 6. It is provided with a motor 9 which turns and drives the polygon mirror 3 and with a photodetector 18 which generates a PD signal when the polygon mirror 3 is set to a specific phase, it turns and drives the polygon mirror 3 so as to be scanned a plurality of times within the imaging time of one screen of the CCD camera 6, and it resets a blinking pattern by the PD signal so as to repeat the same blinking pattern. In addition, the number of times at which the blinking light-emitting operation of a laser beam is performed actually out of a plurality of scanning operations within the imaging time can be selected. |
