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发明名称
MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08316167(A)
申请公布日期
1996.11.29
申请号
JP19950148197
申请日期
1995.05.23
申请人
MITSUMI ELECTRIC CO LTD
发明人
ONODERA SHIGEKI
分类号
H01L21/265;H01L21/324;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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