| 摘要 |
PURPOSE: To reduce extensive deformation of compression-bonded green sheet body by thermocompression bonding using a restraining die made of a material having the same linear expansion coefficient the compression-bonded ceramic green sheet body. CONSTITUTION: An exterior restraining frame 3c made of a material having the same linear expansion coefficient as of a compression-bonded green sheet body or less is provided around a laminated body 1A of a green sheet printed board on which conductive wire patterns are printed and is bonded by thermocompression bonding. An upper die 3a and a lower die 3b are provided with recessed parts along the wiring patterns. The exterior restraining frame 3c is lifted by springs 4 and put a pressure on the green sheet laminated body 1A from upper and lower directions. After the green sheets are stacked in the compression bonding die, a pressure is applied and the sheets are heated by a heater. After decreasing the pressure and cooling, the sheets are taken out from the die and is sintered. The green sheet compression-bonded body is prevented from deformation by the external restraining frame 3c, so that the green sheet compression-bonded body with high dimension precision can be obtained. |
