MIM/MIS ELECTRON SOURCE AND ITS MANUFACTURE

摘要

PURPOSE: To provide such a MIM/MIS electron source and its manufacture as being capable of uniformly and stably emitting electrons in a given place in convenient manufacturing processes. CONSTITUTION: Helium is guided into the first chamber of 500Torr to evaporate gold for generating ultrafine particles Au of diameter 30nm or so, and helium and oxygen are guided into the second chamber of 500torr to evaporate aluminum for generating ultrafine particles Al of diameter 30nm or so with the surface covered by oxide films (Al2 O3 ). Both ultrafine particles are guided into the third chamber and blown from a nozzle to form a mixed layer of both ultrafine particles on a substrate. When voltage V1 is applied to the mixed layer, a tunnel current of Al→Al2 O3→Au flows in MIM junction to cause electron emission.