| 摘要 |
<p>PURPOSE: To provide a substrate member holding device capable of surely holding a glass substrate in a positioned state on a prescribed section. CONSTITUTION: The glass substrate 11 placed on suction pads 15 of an observation section is moved toward reference members 12 to 14 by pressing of pressing members 17, 19 according to the energization of air cylinders 16, 18. The glass substrate 11 is positioned by pressing to these reference members 12 to 14. Air cylinders 23, 24 having press plates 25, 26 disposed on an operation plate 20 and air cylinders 31, 32 having press plates 33, 34 disposed on an operation plate 28 are moved near to the glass substrate 11 liked with this positioning action and the side edges of the glass substrate 11 are pressed by the action of the press plates 25, 26, 33, 34 according to the energization of the air cylinders 23, 24, 31, 32.</p> |
