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发明名称
FABRICATION METHOD OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08316196(A)
申请公布日期
1996.11.29
申请号
JP19950123285
申请日期
1995.05.23
申请人
FUJITSU LTD
发明人
OKUI YOSHIKO
分类号
H01L21/306;H01L21/304;(IPC1-7):H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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