Verfahren zur hochfrequenzbetriebenen Magnetron-Glimmentladungsionisation, sowie Ionenquelle

摘要

The invention relates to a process for ionising sample material in which a plasma is generated on a target containing the sample material by means of a high-frequency-operated magnetron glow discharge and sample material is released from the target with the aid of a sputter gas for transmission to a mass spectrometer and ionised. Here a magnetic field is generated on the surface of the target in such a way that the magnetic field lines in the plasma region are oriented towards the target surface. It is of advantage to arrange a magnet on the side of the target away from the plasma in such a way that the magnetic field lines in the plasma region are oriented towards the target surface.