Micro-structuring of workpiece surface with agglomerate beam

摘要

Microstructure is produced on a material surface by a stream of atom agglomerates passing through a mask which is moved in a controlled way w.r.t. the workpiece to change the structure in all three spatial directions. Either the mask or the workpiece or both are moved w.r.t. the agglomerate beam. The power, current or compsn. of the beam is pref. varied during mask and/or workpiece movement and the workpiece and/or mask may be tilted. The mask may consist of a pattern of perforations, producing fine separate beams on the workpiece.