发明名称 METHOD OF CLEANING PROBE TIPS OF PROBE CARDS AND APPARATUS FOR IMPLEMENTING THE METHOD
摘要 A method of cleaning probe cards provided with probe tips, in which method the tips are cleaned of a contaminating material by exposing the tips to a cleaning solution by dipping in the solution such that only their ends touch the cleaning solution.
申请公布号 WO9633419(A3) 申请公布日期 1996.11.28
申请号 WO1996IB00239 申请日期 1996.03.18
申请人 PHILIPS ELECTRONICS N.V.;PHILIPS NORDEN AB 发明人 HOLLAENDER, EGON;RIEDO, AUGUST
分类号 G01R1/06;G01R1/073;G01R31/26;G01R31/28;H01L21/66;H05K3/26 主分类号 G01R1/06
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