发明名称 |
METHOD OF CLEANING PROBE TIPS OF PROBE CARDS AND APPARATUS FOR IMPLEMENTING THE METHOD |
摘要 |
A method of cleaning probe cards provided with probe tips, in which method the tips are cleaned of a contaminating material by exposing the tips to a cleaning solution by dipping in the solution such that only their ends touch the cleaning solution. |
申请公布号 |
WO9633419(A3) |
申请公布日期 |
1996.11.28 |
申请号 |
WO1996IB00239 |
申请日期 |
1996.03.18 |
申请人 |
PHILIPS ELECTRONICS N.V.;PHILIPS NORDEN AB |
发明人 |
HOLLAENDER, EGON;RIEDO, AUGUST |
分类号 |
G01R1/06;G01R1/073;G01R31/26;G01R31/28;H01L21/66;H05K3/26 |
主分类号 |
G01R1/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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