| 摘要 |
<p>A planar biaxial electromagnetic actuator having two movable plates (12A and 12B) perpendicular to each other. Two static magnetic field generating means (4 and 5) are arranged on both sides of the plates (12A and 12B) in a direction of one diagonal of one of the plates (12A and 12B) in such a way as to face each other. A static magnetic field is impressed upon the plates (12A and 12B) and a magnetic force resulting from the interaction between the magnetic field and the electric currents flowing through driving coils (15A and 15B) is applied to the plates (12A and 12B) so as to drive the plates (12A and 12B). Thus the number of parts of the static magnetic field generating means is small, the structure of the actuator is simple, and the manufacturung cost is low.</p> |
