MATERIAL ANALYSIS DEVICE AND METHOD, IN PARTICULAR FOR CONCENTRATION PROFILES IN LAYERED COMPOSITIONS

摘要

The invention relates to an apparatus for high resolution analysis of concentration profiles in layered compositions. It comprises a particle beam source (1), e.g. a van de Graaff accelerator. There is also provided a sample or target manipulating device (3), a magnetic spectrometer (4) arranged to detect ions scattered from a target exposed to a particle beam from said particle beam source. Said manipulating device and said magnetic spectrometer are enclosed in an ultra-high vacuum housing (2).