发明名称 |
Halbleiterbauelement mit einem auf TEOS-Basis aufgeschleuderten Glas und Verfahren zu dessen Herstellung |
摘要 |
In one form, a TEOS based spin-on-glass is made having on the order of 10% to 25% by volume of tetraethylorthosilicate, the equivalent of on the order of 0.1% to 3.0% by volume of 70% concentrated nitric acid, on the order of 60% to 90% by volume of alcohol, and the balance water. The spin-on-glass is applied to a semiconductor substrate and heated in order to densify the spin-on-glass. <IMAGE> |
申请公布号 |
DE69214683(D1) |
申请公布日期 |
1996.11.28 |
申请号 |
DE1992614683 |
申请日期 |
1992.02.03 |
申请人 |
MOTOROLA, INC., SCHAUMBURG, ILL., US |
发明人 |
MANIAR, PAPU D., AUSTIN, TEXAS 78729, US |
分类号 |
H01L21/312;H01L21/316;H01L23/31;H01L23/532;(IPC1-7):H01L21/316;C03C1/00;C03B8/02;H01L23/29 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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