Ultraschallschleifsystem für keramisches Filter und Verfahren zum Abgleich dafür

摘要

An ultrasonic grinder system for a ceramic filter is disclosed. A metallic layer on the ceramic filter is trimmed by a cutting blade which is vibrated at an ultrasonic frequency. Further, the vibration is fed back to a microcomputer via a sensor and the microcomputer controls movement of a XYZ stage on which both of the cutting blade and ceramic filter are mounted. The CPU detects a standard level of the trimming procedure by the sensor and controls the XYZ stage to obtain a predetermined depth and area of the trimmed portion on the ceramic filter.