发明名称 Apparatus for storing and carrying semiconductor wafers
摘要 <p>The invention provides for apparatus for storing and carrying a plurality of wafers (27) comprising a portable housing (11) that has an exterior with a portal leading to an interior portion of the portable housing. The interior has first and second sides that are substantially parallel to each other. The portal is configured to receive a plurality of wafers (27) and the portal is aligned along a plane. The apparatus also includes grooves (25) located in the interior of the portable housing. The grooves (25) are configured to slidably receive the wafers (27) which are then held in a position that is perpendicular to the plane along which the portal lies. In normal use, the wafers (27) are held in a horizontal position when placed within the housing between the grooves. A door (29) is adapted to cover the portal with a seal being created when the door covers the portal. This seal prevents particles from entering the interior of the portable housing from the exterior. &lt;IMAGE&gt;</p>
申请公布号 EP0744765(A1) 申请公布日期 1996.11.27
申请号 EP19960303631 申请日期 1996.05.21
申请人 SYMBIOS LOGIC INC. 发明人 THORNBERG, GARY R.
分类号 H01L21/673;(IPC1-7):H01L21/00 主分类号 H01L21/673
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