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发明名称
摘要
申请公布号
JP2558880(B2)
申请公布日期
1996.11.27
申请号
JP19890155349
申请日期
1989.06.16
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
FURUBIKI SHIGEMI;SETSUNE KENTARO;WASA KYOTAKA
分类号
C23C14/08;C01G1/00;C01G29/00;C23C28/04;H01B12/00;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):C01G29/00
主分类号
C23C14/08
代理机构
代理人
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